Mks Astron 2l Manual !new! Online

Unlike modern digital controllers, the Astron 2L requires periodic analog upkeep.

Ensure all downstream tubing is ozone-compatible (e.g., Teflon/PFA, 316L Stainless Steel). mks astron 2l manual

: Specifically designed for 100% NF3 process gas feed using ISO KF40 inlet/outlet connections. Unlike modern digital controllers, the Astron 2L requires

Before diving into the manual specifics, it is crucial to understand what the Astron 2L is—and what it is not. Unlike modern digital controllers

(Flat Panel Display) chamber walls. It uses MKS’s patented Low-Field-Toroidal plasma technology to dissociate gases like cap N cap F sub 3